摘要 |
PROBLEM TO BE SOLVED: To provide a voltage/current generation measuring instrument which can measure any time the unbalance voltage between the current buffering amplifiers of a current buffering section provided in the measuring instrument by connecting a plurality of systems in parallel with each other and a semiconductor testing device using the instrument. SOLUTION: A current buffering section 60 installed to the output stage of a voltage/current generation measuring instrument 100 is provided at least with two systems of buffering amplifiers B1, B2, and B3 having balance resistors R11 and R12 connected in parallel with each other at its output terminal and supplies a current to a load device. The instrument 100 is provided with a circular current measuring means which measures the circular current flowing among the outputs of the buffering amplifiers B1, B2, and B3 connected in parallel with each other accompanying the fluctuation of the offset voltages of the plurality of systems of amplifiers B1, B2, and B3.
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