| 摘要 |
PROBLEM TO BE SOLVED: To drain even a liq. having high viscosity in a short time. SOLUTION: A cleaner 12, having a feed circuit 70 for feeding SPM(sulfuric peroxide mixed liquid) to a cleaning tank 60, a drain circuit 71 for draining SPM from this tank 60, a circulation circuit 72 connecting the feed circuit 70 to the drain circuit 71, and a pump 73 attached to the circulation circuit 72 comprises a first bypass 74 for connecting the feed circuit 70 to the drain circuit 71, and a second bypass 75 for connecting the downstream of the pump 73 to the drain circuit 71. SPM drained from the cleaning tank 60 is made to flow into the circulation circuit 72 and sent out by the pump 73 to drain.
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