| 摘要 |
PROBLEM TO BE SOLVED: To provide a focusing ion beam processing device capable of observing a specimen without damaging the specimen. SOLUTION: This focusing ion beam processing device is composed of an ion source 17 generating an ion beam, a means to scan the surface of a specimen 1 with focusing ion beam, a secondary electron sensor 4 to sense secondary electrons emitted from the specimen surface with irradiation of the focusing ion beam, a means to display the signal intensity of the sensed secondary electrons in synchronization with the scan with ion beam, an ultraviolet ray irradiating device 3 to make irradiation of ultraviolet rays, a means to make image formation from and enlarge photo-electrons emitted from the specimen surface with the ultraviolet rays, and a means to acquire a photo-electron image using a sensor 10.
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