发明名称 |
Process for increasing the gas permeability of ceramic bodies, especially silicon carbide setter plates, comprises treatment with a chemical reactive solution or a reactive gas |
摘要 |
Process for increasing the gas permeability of ceramic bodies, especially silicon carbide setter plates, comprises incasing the porosity of the ceramic body by treating with a chemical reactive solution or a reactive gas.
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申请公布号 |
DE19928225(A1) |
申请公布日期 |
2001.01.11 |
申请号 |
DE19991028225 |
申请日期 |
1999.06.19 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
ACKER, THILO |
分类号 |
C04B41/53;C04B41/91;F27D5/00;H01L21/48;H05K1/03;H05K3/00;(IPC1-7):H05K3/46;C04B38/00 |
主分类号 |
C04B41/53 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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