| 摘要 |
PROBLEM TO BE SOLVED: To remove unnecessary deposits generated by the evaporation of an evaporation material without opening a vacuum vessel. SOLUTION: A cup 101 is fixed to the tip of a support bar 102. A roller 103 is fitted to the intermediate part of the support bar and a turning shaft 104 is fitted to the rear end thereof. A rotary lever 107 is fixed to one end of a rotating shaft 106 supported by a bearing 105, and a push rod 108 is fitted to the rotary lever. A liver 109 is fixed to the rotating axis. When the push rod 108 is pushed up, the rotary lever is rotated to rotate the rotating shaft and raise the liner. In this way, the roller is pushed up to raise the tip of the support rod. When the turning shaft is rotated, then the support rod is also turned. When the cup is descended from just above the hollow shaft of an anode part 13, the edge of the cup removes projecting deposits deposited on the inner peripheral surface of a magnet cover 12.
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