| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure liquid chamber having an integrated structure of nozzles and channels and its manufacturing method, and provide a highly reliable and low-cost ink jet head by using a pressure liquid chamber having a nozzle integrated structure. SOLUTION: The ink jet head consists of a multilayer film pressure liquid chamber substrate 10, a diaphragm substrate 2 and a counter electrode substrate 30. An electrostatic attraction force is generated between a diaphragm 22 and a counter electrode 32 to shift the diaphragm 22, whereby the ink in a pressure liquid chamber 14 is pressured and discharged from a nozzle 15. In a method for forming the pressure liquid chambers 14 and nozzles 15 communicating with the pressure liquid chambers, a multilayer film including etching stop layers 12a, 12b and 12c is formed on a glass substrate 11a and etched, whereby the pressure liquid chambers 14 and nozzles 15 are formed (Figs. (I)-(P)). Thereafter, the multilayer film is anodically joined to the Si diaphragm substrate 20, and the glass substrate 11a and etching stop layer 12a are removed by etching.
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