| 摘要 |
PROBLEM TO BE SOLVED: To form a film having high piezoelectric characteristics without causing lowering in polarization characteristics while maintaining strong dielectric characteristics of the piezoelectric crystal by forming a paste from a piezoelectric crystal powder and a crystallized glass powder capable of depositing a solid solution phase by heat treatment, using an organic vehicle. SOLUTION: A piezoelectric film having strong dielectric characteristics and exhibiting high piezoelectric characteristics is formed by using a paste containing a piezoelectric crystal powder including Pb(Zr, Ti)O3 ceramics, a crystallized glass powder capable of depositing a solid solution phase by heat treatment and an organic vehicle. As the piezoelectric crystal powder, a powder having the composition expressed by the formula: Pb(ZrxTi1-x)O3 (x=0.49 to 0.56) is preferable, and if necessary, a perovskite-type compound oxide containing Pb(Zn1/3Nb2/3)O3, Pb(Mg1/3Nb2/3)O3, Pb(Ni1/3Nb2/3)O3 or the like, and further BaTiO3 in an amount of 10 to 40 wt.% in addition to the Pb(ZrxTi1-x)O3 (x=0.49 to 0.56) is used. Further, as the crystallized glass powder, a powder containing PbO-TiO2ZrO2-SiO2 as main components and Bi2O3 or MnO2 in a prescribed composition is preferable. |
