发明名称 Semiconductor package, semiconductor device, electronic device and production method for semiconductor package
摘要 An insulating layer (3) is formed on a Si wafer (1). An opening portion is made in this insulating layer (3), and subsequently a rerouting layer (2) is formed. Next, a resin layer (4) is formed on the rerouting layer (2). The resin layer (4) is then cured so that the rerouting layer (2) and a Cu foil (5) are bonded to each other through the resin layer (4). Thereafter, a ring-like opening portion (4a) is made in the resin layer (4), and a Cu plating layer (8) is formed inside this opening portion (4a). <IMAGE>
申请公布号 AU5109000(A) 申请公布日期 2001.01.02
申请号 AU20000051090 申请日期 2000.06.12
申请人 FUJIKURA LTD. 发明人 MASATOSHI INABA;TAKANAO SUZUKI;TADANORI OMINATO;MASAHIRO KAIZU;AKIHITO KUROSAKA
分类号 H01L21/60;H01L23/31;H01L23/485 主分类号 H01L21/60
代理机构 代理人
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