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发明名称
SEMICONDUCTOR WAFER INPUT/OUTPUT HANDLING SYSTEM
摘要
申请公布号
EP1062172(A1)
申请公布日期
2000.12.27
申请号
EP19980963226
申请日期
1998.12.15
申请人
SEMITOOL, INC.
发明人
DAVIS, JEFFRY, A.;DOLECHEK, KERT, L.;CURTIS, GARY, L.
分类号
B65G49/07;H01L21/00;H01L21/673;H01L21/677;H01L21/687;(IPC1-7):B65G47/90
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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