| 摘要 |
<p>PROBLEM TO BE SOLVED: To conduct high quality machining without any crack by converting a part of laser beam emitted from a solid laser source with a wave length converting means and condensing the generated laser beam of a ultraviolet zone on the surface of the object to be machined. SOLUTION: The fifth higher harmonic wave of the laser beam expanded with a beam expander 3 is reflected with respective dichroic mirrors M1 -M3 and made incident on a convex lens L. A basic wave and the low level higher harmonic wave of the fourth higher harmonic wave or below transmit respective dichroic mirrors M1 -M3 and are absorbed into beam stoppers S1 -S3 . The object 10 to be machined is transferred in parallel within the flat surface orthogonal to an optical axis with a biaxial stage 5 based on the control signal from a controller 7. When the object 10 to be machined is set in the prescribed position, a setting completion signal is sent out to the controller 7. An opening is provided in the position corresponding to the laser beam irradiating part of the biaxial stage 5. When a through hole is formed in the object 10 to be machined, the biaxial stage 5 is transmitted with the laser beam.</p> |
