发明名称 Method of manufacturing semiconductor device
摘要 A semiconductor device having a memory device and a logic device formed together on a single chip is provided. A first element region and a second element region of a semiconductor substrate are formed spaced apart from each other with an isolation region therebetween. A floating conductive film is provided on the isolation region.
申请公布号 US6162674(A) 申请公布日期 2000.12.19
申请号 US19990357916 申请日期 1999.07.21
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MOTONAMI, KAORU
分类号 H01L21/8234;H01L21/82;H01L21/8239;H01L21/8242;H01L27/088;H01L27/10;H01L27/105;(IPC1-7):H01L21/824 主分类号 H01L21/8234
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