| 摘要 |
PROBLEM TO BE SOLVED: To prevent the action of excessive force to a sample and to enhance measuring accuracy in the observation of a surface shape and the measurement of adsorbing power by a scanning probe microscope. SOLUTION: A force curve measuring means 11 setting the compression and pulling limit values of the acting force applied across a cantilever 2 and a sample S to control the position of the sample so that measured acting force enters a range determined on the basis of the set limit value and measuring the acting force applied across the cantilever and the sample on the basis of the displacement of the cantilever is provided and the measurement of a surface shape using position data becoming a compression set limit value and the measurement of adsorbing power using position data becoming a pulling set limit value are performed while the cantilever is moved on the surface of the sample at every measuring point. A range measuring a force curve is designated based on the bending quantity of the cantilever and the acting force applied to the sample is restricted to the set limit value to prevent the action of excessive force.
|
