| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform reliable and highly precise height compensation without requiring a complicated work for condition setting even if a specimen surface has a complicated irregular shape. SOLUTION: This electron probe microanalyzer is to analyze an element on the surface of a specimen by a characteristic X-ray radiated from a specimen S by irradiation of an electron beam, and is equipped with a means of computation 2 to compute a coordinate value to control a specimen stage 17 from three- dimensional data of the surface of the specimen S, and a means of driving a specimen stage (3, 4) to drive the specimen stage 17 based on the coordinate value computed by the means of computation 2. The means of computation 2 includes a three-dimensional first coordinate transformation to transform the coordinate system of the three-dimensional data to the coordinate system on the specimen stage side, and a second coordinate transformation to transform a Z coordinate value in the three-dimensional data to a vertical coordinate value satisfying an analysis condition in the specimen stage 17, and controls the position of the specimen in a Z-axis direction so that the surface of the specimen S satisfies a height in an analysis condition.</p> |
