发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device which facilitates ion implantation process. SOLUTION: P-type impurity ions are implanted without a mask to form a rediffusion region 43 continuous with a source and drain region 36a in an N well 16. Thereafter, the N well 16 is covered with the resist and N-type impurity ions are implanted to form a rediffusion region which is continuous with a source and drain region 39a in a P well 17. The implantation dosage of the P-type impurity ions is smaller than that of the N-type impurity ions.
申请公布号 JP2000340678(A) 申请公布日期 2000.12.08
申请号 JP20000059123 申请日期 2000.03.03
申请人 TOSHIBA CORP 发明人 MIYAMOTO KOJI;INOUE KOTARO
分类号 H01L21/28;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823 主分类号 H01L21/28
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