发明名称 |
MANUFACTURE OF SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device which facilitates ion implantation process. SOLUTION: P-type impurity ions are implanted without a mask to form a rediffusion region 43 continuous with a source and drain region 36a in an N well 16. Thereafter, the N well 16 is covered with the resist and N-type impurity ions are implanted to form a rediffusion region which is continuous with a source and drain region 39a in a P well 17. The implantation dosage of the P-type impurity ions is smaller than that of the N-type impurity ions.
|
申请公布号 |
JP2000340678(A) |
申请公布日期 |
2000.12.08 |
申请号 |
JP20000059123 |
申请日期 |
2000.03.03 |
申请人 |
TOSHIBA CORP |
发明人 |
MIYAMOTO KOJI;INOUE KOTARO |
分类号 |
H01L21/28;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823 |
主分类号 |
H01L21/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|