| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for the production of an MR head by which fluctuation of the height of an upper magnetic pole can be eliminated as much as possible and the MR head having stable writing characteristics can be produced. SOLUTION: This method includes a process of exposing an upper magnetic pole top end and a lower magnetic pole 13 corresponding to the upper magnetic pole top end through an aperture and of forming a second resist film having 10 to 15μm thickness on the inner wall and 1 to 3μm distance from the floating face of the aperture inside wall of the upper magnetic pole top end, a process of ion milling to irradiate the inside of the aperture with ion beams at any incident angle except for 0 deg. by using the second resist film as a mask to etch the exposed lower magnetic pole 13 to specified depth while rotating a substrate, and a process of removing the second resist film.
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