发明名称 CONDUCTIVE BALL MOUNTING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To enable sure mounting of the necessary number of solder balls on a package without forming dimples on a ball suction surface of an alignment mask. SOLUTION: This conductive ball mounting equipment is constituted by installing a ball supply part which levitates and supplies solder balls, a flux supply part spreading flux on the solder balls, a mounting part positioning a package, an alignment mask connected with a vacuum pressure supply source in which mask a plurality of holes for sucking the solder balls are formed in the same arrangement as that of connecting terminals of the package, and a carrying part moving the alignment mask. In this case, vacuum pressure setting devices 11a, 11b, 11c are installed between a vacuum pressure supplying source 8 and an alignment mask 6.
申请公布号 JP2000332046(A) 申请公布日期 2000.11.30
申请号 JP19990143271 申请日期 1999.05.24
申请人 HITACHI VIA MECHANICS LTD;HITACHI LTD 发明人 NAITO YOSHITATSU;OSAKA YOSHIHISA;SAJIKI KOJI;INOUE KOSUKE;DAIROKU NORIYUKI;SUZUKI TAKAMICHI
分类号 H01L23/12;H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L23/12
代理机构 代理人
主权项
地址