| 摘要 |
PROBLEM TO BE SOLVED: To lower the drop in load voltage. SOLUTION: This equipment comprises a thyristor rectifier 11, a DC filter 12, an inverter 31, a transformer 32, a rectifier 33, and an ion source 6. When the equipment is restarted after it has stopped, the ion source 6 is in non- operation time, and therefore the thyristor rectifier 11 is gate-blocked and the phase control signal of the thyristor rectifier 11 is held. As the initial value for the phase control signal when the equipment is restarted, the value just before the stoppage is used.
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