发明名称 TRANSPORTING DEVICE FOR LIQUID CRYSTAL SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a transporting device for a liquid crystal substrate which is efficient in terms of a cost and space and allows the easy change of a cleaning operation and the simple condition establishment of the cleaning operation. SOLUTION: This transporting device has a substrate transporting unit 4 which has a substrate holding means 8 for holding the liquid crystal substrate 3 in a production stage for liquid crystal panels and a substrate moving means 7 for moving the substrate holding means to a take-out position and a feeding position and a substrate cleaning unit 10 for cleaning the liquid crystal substrate. The operation route of the substrate transporting unit 4 and the substrate cleaning unit 10 is controlled by a control means 9 having a memory means 24 in which program software is stored in such a manner that the transporting operation of the substrate transporting unit to the liquid crystal substrate and the cleaning operation of the substrate cleaning unit to the liquid crystal substrate are carried out by a series of movements.
申请公布号 JP2000330097(A) 申请公布日期 2000.11.30
申请号 JP19990136795 申请日期 1999.05.18
申请人 RICOH CO LTD 发明人 MUTO TOSHIYUKI
分类号 H01L21/677;G02F1/13;G02F1/1333;G09F9/00;H01L21/68;(IPC1-7):G02F1/133 主分类号 H01L21/677
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