发明名称 CANTILEVER FOR SCANNING NEAR-FIELD OPTICAL MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To obtain a cantilever, for a scanning near-field optical microscope(SNOM), in which the scattering efficiency of a probe tip is increased more than that of a probe part other than the tip. SOLUTION: This cantilever 10 for an SNOM is provided with a lever part 14 which is supported by a support part 12 in an overhang mounted manner. A triangular pyramid-shaped probe 16 is formed at the free end of the lever part 14. A very small spherical scattering body 18 is installed at the tip part of the probe 16. The lever part 14 and the probe 16 are constituted mainly of silicon or silicon nitride. In addition, the very small spherical scattering body 12 is constituted of a substance whose scattering efficiency is large as compared with that of silicon or silicon nitride which constitutes the lever part 14 and the probe 16. Preferably, it is constituted of gold colloid.
申请公布号 JP2000329676(A) 申请公布日期 2000.11.30
申请号 JP19990143277 申请日期 1999.05.24
申请人 OLYMPUS OPTICAL CO LTD 发明人 YAMAGUCHI MITSUSHIRO
分类号 G01B11/30;G01N37/00;G01Q60/22;G01Q70/00;G12B1/00;(IPC1-7):G01N13/14 主分类号 G01B11/30
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