| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflection spectrum measuring method and apparatus capable of performing non-destrictive measurement without processing the surface of a sample. SOLUTION: In a reflection spectrum measuring method, a sample 3 is irradiated with light while the angle of light incident on the sample 3 is changed to obtain a series of spectra which are, in turn, subjected to integral processing by a computer 6, the data based on a diffused reflection component among a series of the integrated data is separated by the computer 6 to be differentiated by the computer 6, and only the spectrum data base on the diffused reflection data among the spectra obtained by the reflection measurement of reflection spectra is extracted.
|
