Determination of material properties, such as Young's Modulus, of micro-structures with dimensions less than around 2 mm by deflection of a test element and measurement of a representative value before and during deflection

摘要

Device has a substrate (11) on which a bending element (10) of the material under test is mounted, with the length (1) of the element less than 2000 micrometers. Bending of the element is induced by application of a set D.C. voltage or a DC voltage with a superimposed high frequency AC voltage. Measurement of Young's modulus is using an electrode (12) which creates a capacitance with the bending element. The change of capacitance caused by the applied voltage can be used to determine material properties such as the Young's modulus. Alternately an electromagnetic wave or ultrasonic wave measurement technique can be used.