METHOD FOR EFFECTIVELY USING VACUUM PUMP IN SEMICONDUCTOR MANUFACTURING SYSTEM

摘要

PURPOSE: A method for effectively using a vacuum pump in a semiconductor manufacturing system is provided to have the inside of a loadlock chamber and a transfer chamber become a vacuum state by using an auxiliary pump, in which the loadlock chamber and transfer chamber do not need utility such as nitrogen. CONSTITUTION: An auxiliary pump operates to maintain a vacuum state of a loadlock chamber when a wafer is induced to the loadlock chamber. The auxiliary pump operates to maintain a vacuum state of a transfer chamber when the wafer is transferred from the loadlock chamber to the transfer chamber. A main pump operates to maintain a vacuum state of a main process chamber when the wafer is transferred from the transfer chamber to the main process chamber. A wafer process is performed in the main process chamber.