DUST-COLLECTING AND DEHUMIDIFYING METHOD AND DEVICE FOR SUPPRESSION CHAMBER

摘要

PROBLEM TO BE SOLVED: To reduce humidity inside a suppression chamber while restraining diffusion of dust to the outside. SOLUTION: A circulation-blowing route is formed to make air inside a suppression chamber 6 flow into the suppression chamber 6 through a temporary duct 18, a filter 15 and a fan 16 of a dust collector 17, an air duct 19, a dehumidifier 20 and a temporary duct 21, dust generated at the time of grinding/ polishing/cleaning work is captured by the filter 15 inside the suppression chamber 6, and moisture contained in the air inside the chamber 6 is removed the dehumidifier 20 provided outside the suppression chamber 6.