| 摘要 |
PROBLEM TO BE SOLVED: To prolong the usable period of deposition preventive boards for a countermeasure of dust in a sputtering system and to improve the working ratio. SOLUTION: As for a deposition preventive board 31 and a deposition preventive board 32 covering the circumference of a substrate 5, the deposition preventive board 31 works as a 1st deposition preventive part confronted with a target 1, and the deposition preventive board 32 is located on the outer circumference of the 1st deposition preventive part and works as a 2nd deposition preventive part which is not confronted with the target 1. The back face of the deposition preventive board 32 is arranged with a magnet 4 so as to form magnetic flux going from the target 1 toward the 2nd deposition preventive part, and the polarity of the pole 4a closer to the deposition preventive board 32 among the poles of the magnet 4 is set to the one same as the polarity of the pole 3a at the outside of the target in a magnetic circuit 3. Electrons applying a heat shock on the deposition preventive boards are introduced by a magnetic flux and flow into the deposition preventive board 32. The thickness of a film adhered to this part is thin, its peeling is suppressed, and the usable period of the deposition preventive boards can be prolonged.
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