| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring system in which measurement error is eliminated while preventing any one of a probe or a displacement gauge from being collapsed through contact when the follow-up of a moving stage is increased due to erroneous operation or in order to increase scanning speed. SOLUTION: The shape measuring system comprises a probe 2, and a flexure detecting means 9 wherein the flexure detecting means 9 comprises a correction means and the probe 2 has a hollow structure. After being brought into contact with a plane being measured, the probe 2 is moved to go away from the plane being measured in order to search a position where the flexure matches a target value. With such an arrangement, lowering of measurement accuracy is suppressed even for high speed scanning and the shape measuring system is protected against damage.
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