| 摘要 |
PROBLEM TO BE SOLVED: To provide an oscillation type angular speed sensor of a suspension structure which does not suppress oscillation of an oscillation beam while the voltage of Coriolis force is efficiently taken out by forming a split electrode of a specified form on the main surface of a piezoelectric substrate. SOLUTION: An angular speed detecting sensor is assembled of an oscillator 1 which oscillates in Z-axis direction, metal suspensions 30 and 31, and insulating fixing stage 14. Three split electrodes are formed on the main surface of a first piezoelectric substrate 2 and that of a second piezoelectric substrate 3. Two of the three split electrodes are so arranged to be symmetric about the center line in the longitudinal direction as well as that in width direction of the first piezoelectric substrate 2, forming a rectangular form. On the main surface of the second piezoelectric substrate 3, electrodes are formed in the same position and form with the three split electrodes. Since a detection electrode is formed on the outermost periphery in widthwise direction, an optimum electrode form is provided for maximum sensitivity, improving sensitivity of an angular speed sensor. |
