发明名称 ULTRASONIC BONDING AND MOUNTING METHOD AND ULTRASONIC BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To achieve stable and highly reliable bonding by increasing the margin, while properly setting bonding conditions for facedown bonding a chip element to a resin board. SOLUTION: When connecting electrodes of a chip element CP are subjected to ultrasonic bonding to wiring electrodes provided on a resin board 10 to thereby mount the element CP on the board 10, a heater 5 is provided which heats the board 10 to a temperature at which the ratio of modulus of elasticity εh of the board 10 at a heated temperature to modulus of elasticity εr thereof at room temperature becomes such that 1>εh/εr>=0.5. The heater 5 can be located on the side of a board mounting table 4.
申请公布号 JP2000306957(A) 申请公布日期 2000.11.02
申请号 JP19990113213 申请日期 1999.04.21
申请人 TDK CORP 发明人 GOTO MASASHI;KANAZAWA JITSUO;HARA HIROKI
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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