| 摘要 |
<p>A method and an apparatus that quantitatively calculate the yield improvement rate for each of defect countermeasures, defect determination of the priority of the countermeasures against defect causes, and enable to practice countermeasures of higher improvement rates. The apparatus is characterized by comprising an inspection means (102) that detects defects existing on a semiconductor chip and a yield calculation means (104) that predicts the yield based on information on a semiconductor chip from which specified defect causes among those clarified from the detected defects are assumed to be removed.</p> |
