SEMICONDUCTOR WAFER CARRIER

摘要

PURPOSE: A semiconductor wafer carrier is provided to minimize remaining impurity when a silicon wafer cleaning process is performed by changing the structure a wafer carrier. CONSTITUTION: A semiconductor wafer carrier transfer/keeps a silicon wafer(100). Two supports(5) form a lower body of a carrier. Two upper supports(7) are each curved at an end of a longitudinal support(1) and a rear face plate(3) and are integrally formed at an upper portion of the supports(5). A plurality of the first guides(51) are projected in the shape of diamond along the supports(5) and fix the bottom end of the wafer(100). A plurality of the second guides(71) are projected in the shape of diamond along the supports(7) and fix the top end of the wafer(100).