MANUFACTURING METHOD OF LENS-TYPE LIGHT CONCENTRATION STRUCTURE

摘要

PURPOSE: A manufacturing method of a lens-type light concentration structure is provided to increase laser concentrating efficiency and manufacturing precision by directly processing the silicon plate. CONSTITUTION: A determined thickness of silicon epitaxial layer(2) is formed in multi layer on a silicon plate(1) top doped with impurity. The impurity concentration is distributed to be increasingly larger away from the center of the silicon epitaxial layer(2). Some region of the silicon epitaxial layer(2) is etched to expose the silicon plate(1), in order to form a silicon epitaxial layer pattern(4). Impurity is diffused on the entire surface including the silicon epitaxial layer pattern(4). An oxide layer grown by a thermal oxidation process is etched and a light concentration structure with 3-dimensional convex lens shape is formed vertically on the silicon plate(1).