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经营范围
发明名称
Measuring apparatus for ion implantation
摘要
申请公布号
GB2349503(A)
申请公布日期
2000.11.01
申请号
GB20000010189
申请日期
2000.04.26
申请人
* NISSIN ELECTRIC CO LTD
发明人
SHIGEKI * SAKAI
分类号
H01J37/20;G01Q30/02;G21K5/04;H01J37/02;H01J37/04;H01J37/244;H01J37/317;H01L21/265;H01L21/66;(IPC1-7):H01J37/244
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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