发明名称 BIAXIAL DRIVE DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent reduction of responsiveness and an operation speed through simple constitution. SOLUTION: This drive device comprises a linear guide rail 11; a table 13 slidably mounted on the guide rail; a rotary shaft 14 rotatably mounted on the table; a first drive mechanism A moving the table along the guide rail; and a second drive mechanism to rotate the rotary shaft. The second drive mechanism is provided with a motor 1 to exert rotation on the rotary shaft and the first drive mechanism is connected to the first drive mechanism through a clutch mechanism 2.
申请公布号 JP2000301478(A) 申请公布日期 2000.10.31
申请号 JP19990111635 申请日期 1999.04.20
申请人 NEC CORP 发明人 KAWAKAMI SHIGETOSHI
分类号 B23Q5/38;B25J9/06;H01L21/677;H01L21/68;(IPC1-7):B25J9/06 主分类号 B23Q5/38
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