| 摘要 |
PROBLEM TO BE SOLVED: To constitute a vacuum pump produced at low cost, having high reliability, and provided with a gas bearing. SOLUTION: Stator members 18, 22, 26 of a gas bearing are connected to a bearing casing 8 via elastic body structures 50, 54, 58. The elastic body structures are also functioned as sealing members sealing between a high- pressure space of the bearing casing 8 and a low-pressure space of a backpressure chamber. Gas exhaust pipelines 38, 40, 42 of the gas bearing may be connected to the vacuum pump devices 11, 12 and, if the vacuum pump is provided with an exhaust stage exhausting gas to the atmosphere, they may be connected to the position of the exhaust stage or the low-pressure side of the exhausts stage. In either case, the gas can be exhausted using a compressor device. The compressor device is not necessary to have high performance and in some case, no compressor device is required.
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