| 摘要 |
PROBLEM TO BE SOLVED: To provide a chamber interior member moving device which can effectively prevent dew condensation when maintaining a chamber interior in a low-temperature state, and provide a parts handling device using it. SOLUTION: A tray horizontally conveying device 360 has a driving wire 330 driving a moving member 320a movably arranged inside a chamber having it's interior set in a condition different from an external environment, a driving motor 342 arranged outside the chamber and connected to the driving wire 330 so as to drive the driving wire 330 along a longitudinal direction, a driving wire lead-in member mounted to a chamber wall and having a through hole where the driving wire 330 penetrates the interior and exterior of the chamber formed thereon, and a felt ring attached to the through hole of the driving wire lead-in member and slidingly contacting the outer periphery of the driving wire 330. A supply opening spouting dry air is provided in the chamber interior side of the through hole of the driving wire lead-in member. |
