| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the optical axis of an exposure lamp to be adjusted in a shorter time, when the exposure lamp is replaced. SOLUTION: This manufacturing error measuring device is equipped with a structure for recording data as to manufacturing errors in the position of a brightness center or the tip of an electrode inside an exposure lamp and records the data. An error measuring means (b) which measures the position of an electrode tip or a brightness center inside an exposure lamp and a recording means (c), which records data as to manufacturing errors obtained resting on the measurement result on the exposure lamp are provided. An aligner is equipped with a reading means, which reads in data as to manufacturing errors recorded on an exposure lamp and an optical axis adjusting means, which adjusts the optical axis of an exposure lamp resting on the data read in through the reading means.</p> |
