| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electrostatic actuator, having high durability by restricting the occurrence of adhesion of counter electrodes and the overlapping of hydrophobic films formed on the surfaces of the electrodes. SOLUTION: Hydrophobic films 22, 23, consisting of HMDS (hexamethyldisilane), are respectively formed on the surface of a diaphragm 5 as one counter electrode at an electrostatic inkjet head 1 and on the surface of a segment electrode 18 as another opposite electrode. This space 15 between these counter electrodes is sealed airtightly with a sealing material 20, this space 15 is filled with a discharge restricting gas having a discharge start potential higher than that of nitrogen gas, and also the HMDS is sealed at a concentration higher than 0.3%. Thus, discharge between the electrodes can be restricted, and the occurrence of overlappings between the hydrophobic films caused by a discharge between the electrodes can be restricted.
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