| 摘要 |
PROBLEM TO BE SOLVED: To perform a method for processing adapted to process a clothing film covered with the outer periphery of a core wire by preparing an object to be processed containing the wire and a clothing film covering its outer periphery, irradiating the film with a radiant ray while rotating at a central axis of the wire as a rotary axis, and partly etching the clothing film. SOLUTION: A synchrotron radiant ray (SR ray) 2 is radiated along the optical axis 5 from electrons circulating an electron orbit 1 formed in a synchrotron. A mask 3 is disposed at a light source side from an object 4 to be processed in an optical path of the ray 2. A region of a desired shape for passing the ray 2 is formed at the mask 3, the ray 2 is emitted to the surface of the object 4, and etches the object 4. The object 4 has a metal core wire 4a and a clothing film 4b covering the outer periphery of the wire 4a. The film 4b is formed of a material to be etched by irradiation with the ray 2. Further, the object 4 is rotatable at the central axis of the wire 4a as a rotary axis. |
