| 摘要 |
PROBLEM TO BE SOLVED: To suppress the variations of an offset oscillation and a detected oscillation due to breaking of a piezoelectric ceramic-made square columnar oscillator provided in an oscillation type angular velocity sensor. SOLUTION: The angular velocity sensor comprising a tuning fork-like oscillator 1 composed of arms 4, 5 forming a pair of square columnar oscillators and a connection 6 connecting the arms 4, 5, and driving and detecting electrodes 10-24 formed on the oscillator 1 drives the arms 4, 5 in a y-axis direction and detects an oscillation state of the arms 4, 5 oscillating in an x-axis direction when an angular velocity around a z-axis is inputted. The entire corners 7 of the arms 4, 5 in the length direction are uniformly chamfered or portions of the corners 7 easy to break are chamfered to form chamfered portions 8. |
