| 摘要 |
PROBLEM TO BE SOLVED: To improve yield by limiting adverse effect of dust lying in a junction surface between substrates by providing a fragile part to at least one of a supporting division part in a circumference of an element in a supporting base substrate and a lid division part of a lid base substrate. SOLUTION: A fragile part consisting of a groove 7a and a thin part 7b is provided to a lid division part 9f of a lid base substrate 9. If dust 8 lies in a junction surface between a supporting division part 1f of a supporting base substrate 1 and a lid division part 9f of an element lid substrate 9c during anode junction of the supporting base substrate 1 and the lid base substrate 9, junction of the element lid substrate 9c is defective. However, element lid substrates 9b, 9d in a circumference of the element lid substrate 9c is attracted to the supporting base 1 as the thin part 7b is deformed or broken by attraction function of static electricity and joined to the supporting base substrate 1. The fragile part 7 can be provided to the supporting division part 1f of the supporting base substrate 1 or can be provided to both the supporting division part 1f of the supporting base substrate 1 and the lid division part 9f of the lid base substrate 9. |
