发明名称 HIGH OUTPUT SEMICONDUCTOR LASER AND MANUFACTURE OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor laser applicable to a rewritable optical disk necessitating a laser light source with a high light output, and increased in a kink light output, and decreased in operating currents by keeping heating due to injecting currents low at the time of laser oscillation, and a method for manufacturing this semiconductor laser. SOLUTION: A mesa 112 is formed under the condition of a proper etching gas pressure and a proper substrate temperature by dry etching so that a double heterostructure constituted of at least an active layer 104 and clad layers 103 and 107 interposing this active layer 104 cam be formed on a substrate 102 constituted of a zincblende type compound semiconductor whose substrate facial azimuth is inclined from 001. Also, mesa-shaped stripes for operating light closure to a horizontal direction are formed, and the cross section shapes vertical to the stripe directions of the mesa are made symmetrical when viewed with the substrate below so that a semiconductor laser without any sagging at the mesa fringe can be manufactured.
申请公布号 JP2000294877(A) 申请公布日期 2000.10.20
申请号 JP19990101341 申请日期 1999.04.08
申请人 NEC CORP 发明人 TADA KENTARO
分类号 H01S5/00;H01S5/227;(IPC1-7):H01S5/227 主分类号 H01S5/00
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