| 摘要 |
PROBLEM TO BE SOLVED: To improve a mechanical strength of a connecting portion and to prevent a crosstalk from occurring by conductively connecting a flexible cable between the portion and a connecting area of the vibrator through an anisotropically conductive layer, and embedding between the vibrators with a polymer bonding agent for constituting the conductive layer. SOLUTION: A polymer material excluded from opposed regions of a segment electrode and a connecting portion 33 of a flexible cable 13 flows to a gap between piezoelectric vibrators, and conductive particles are existed in a high density at the opposed regions between the electrodes and the portion 33 of the cable 13 to generate conductivity. The material flowed to and solidified in the gap between the vibrators to the opposed regions between the electrodes and the portion 33 increases its mechanical strength by connecting the vibrators to one another by a non-vibrating region. A vibration wave is propagated to the fixed substrate side as the vibrator 9 is contracted and extended, but absorbed by viscoelasticity of the material, thereby preventing a crosstalk.
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