Method for verifying semiconductor device tester

摘要

A method for verifying correct operation and functional stability of a tester for semiconductor devices is disclosed. In addition, a method for creating a standard device for use with the tester is also disclosed. In creating a standard device according to the present invention, the tester repeatedly tests a candidate device a predefined number of times and evaluates the test results to determine whether the candidate device is suitable for use as a standard device. In verifying the operation and functional stability of a semiconductor device tester, data generated by repeatedly testing a standard device a predefined number of times are compared to recorded reference data of previous tests of the standard device.