发明名称 FILM-FORMING COMPOSITION, FILM-FORMING METHOD AND FILM WITH LOWERED DENSITY
摘要 PROBLEM TO BE SOLVED: To obtain film-forming compositions excellent in dielectric properties, mechanical strength and the like, and films obtainable by curing these compositions. SOLUTION: Film-forming compositions contain (A) a hydrolyzate of a compound represented by the formula: R1nSi(OR2)4-n (wherein R1 and R2 may be the same or different and each is a monovalent organic group; and n is an integer of 0-2) and its partial condensation product or either of the two, (B) an acid catalyst, and (C) a compound having a boiling point or a decomposition temperature of 250-450 deg.C which is miscible with or dispersible in component (A). Two or more compounds represented by the above described formula are preferably used.
申请公布号 JP2000290590(A) 申请公布日期 2000.10.17
申请号 JP19990104168 申请日期 1999.04.12
申请人 JSR CORP 发明人 HAYASHI EIJI;SUGIURA MAKOTO;KUROSAWA TAKAHIKO;GOTO KOHEI;YAMADA KINJI
分类号 C09D183/04;C09D133/00;C09D171/02;(IPC1-7):C09D183/04 主分类号 C09D183/04
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