EFFUSION CELL FOR EPITAXIAL APPARATUS

摘要

PURPOSE: An evaporation crucible for an epitaxial apparatus is provided to minimize the contamination of the apparatus and the time required to recover the state. CONSTITUTION: A gate valve is installed between an entrance flange and an adapter flange of a vacuum chamber, and maintains the vacuum in the vacuum chamber by being isolated from the external, and is opened/closed to introduce vacuum into the vacuum chamber. An introduction tube comprises a heater providing heat to evaporize a growth material and a supporter supporting the heater. And, a crucible flange(23) is combined with a bottom flange of an adapter by being installed to one end of the introduction tube. And, a fringe tube(25) is extended and shrunken to separate the introduction tube from the vacuum chamber by removing a local vacuum as maintaining the vacuum of the vacuum chamber.