| 摘要 |
A positioning method of detecting a position of an object, fixed on a driving device, in a direction of height as a driving direction, by a surface position detector, while scanning the object in a direction perpendicular to the driving direction of the driving device and positioning and correction driving the object by the driving device to sequentially set the object at a predetermined position and a predetermined height. The method includes a step of monitoring a driving condition of the driving device in synchronism with a periodical detection performed by the surface position detector and a step of correcting a drive amount of the driving device on the basis of the periodical detection performed by the surface position detector and a result of the monitoring performed in the monitoring step. The correcting step includes the steps of (i) calculating a mean data of the drive amount by the driving device in one detecting period of the periodical detection performed by the surface position detector, on the basis of the result of the monitoring, and (ii) obtaining a correction amount of the driving on the basis of the mean data and the detection result of the surface position detector obtained in the one detecting period.
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