| 摘要 |
PROBLEM TO BE SOLVED: To provide a cell inspection apparatus and cell inspection method capable of efficiently carrying out inspection with high reliability by detecting the objective region in spite of rough positioning in correspondence to production of a small quantity in diversified kinds when carrying out the defect inspection of liquid crystal products in the state before sticking of a polarizing plate. SOLUTION: Back light illumination 11 is put out and a liquid crystal cell substrate 8 is projected from above by coaxial vertical illumination 7, by which the image of the part coated with a sealing material is acquired when carrying out the defect inspection of the liquid cell substrate 8 before sticking of the polarizing plate with this cell inspection apparatus. The inspection is carried out after the objective region for the defect inspection of the intrinsically transparent liquid cell substrate 8 is confined by using the image. With regards to the other regions, the presence or absence of the defect is disregarded, by which a yield is improved and the processing time is shortened.
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