| 摘要 |
PROBLEM TO BE SOLVED: To prevent the tip of a probe from colliding with a sample surface when the probe is rotated in an image observation visual field. SOLUTION: When the rotation angle of an image observation visual field is set and rotation is instructed during the scanning of a probe, a control device 2 feeds the data of the rotation angle to a rotation calculating circuit 6 after receiving a detection signal from a middle point detecting circuit 5, not immediately. The image observation visual field is rotated at the middle point of the image observation visual field, thus the probe is not moved unlike in the past, and the tip of the probe does not collide with a sample surface. When a change of the image observation magnifying power is instructed during the scanning of the probe, the changing action of the image observation magnifying power is made at the middle point of the image observation visual field, and the tip of the probe can be prevented from colliding with the sample surface.
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