| 摘要 |
The invention relates to a device for manufacturing semiconductor products. Said device comprises a plurality of manufacturing units (2) and measuring units (3) in at least one clean room (4). An arrangement of treating stations (1) is provided in said clean room which arrangement comprises at least one manufacturing (2) or measuring unit (3), a manufacturing buffer located adjacent to said unit for depositing semiconductor products and a handling unit for automatically supplying and delivering the semiconductor products. The treatment stations (1) are interlinked via a conveyor system (5).
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