| 摘要 |
PROBLEM TO BE SOLVED: To provide an element recognizing method capable of recognizing an element without depending on the number of elements desired to distinguish the number of recognizing layers. SOLUTION: In order to recognize the elements of transistors N1, N2 and N3 in the same layout structure at the time of verification, layout data are prepared by arranging recognition patterns 11-13 having the different number of contact sides in different two layers corresponding to minimum gate lengths G1-G3 of MOS transistors. The elements can be recognized by extracting the recognition patterns 11-13 from the layout data. The recognition patterns 11-13 are graphic data when the number of contact sides between a white rectangular graphic arranged in a certain layer and a black rectangular graphic arranged in the other layer is 2, 3 or 4 and at the time of verification, the element is recognized from the number of contact sides of these graphic data. Regardless of the number of kinds of elements, the graphic data are arranged in two recognizing layers.
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