| 摘要 |
PROBLEM TO BE SOLVED: To simplify focusing work. SOLUTION: An objective lens 6 or a stage 7 is moved along an optical axis direction, a focusing evaluation is executed based on a digital signal from an A/D converter 23a in accompaniment to the moving therein, and focusing control for an observing object 8 on the stage 7 is conducted based on a result thereof. For example, the stage 7 is moved along an XY direction to move the observing object 8, and the focusing control for the object 8 is temporarily stopped until a factor of detected movement of the object 8 is removed, when a condition moved hereinbefore is detected by a stage-movement detecting part 27. |
